Design and simulation analysis of a novel pressure sensor based on graphene film
| Publication Date: |
2018-02-20
|
|---|---|
| Publisher: |
Institute of Physics (IOP)
|
| Print ISSN: |
1757-8981
|
| Electronic ISSN: |
1757-899X
|
| Topics: |
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
|
| Published by: |
| _version_ | 1836398801605099521 |
|---|---|
| autor | M Nie, Y H Xia and A Q Guo |
| beschreibung | A novel pressure sensor structure based on graphene film as the sensitive membrane was proposed in this paper, which solved the problem to measure low and minor pressure with high sensitivity. Moreover, the fabrication process was designed which can be compatible with CMOS IC fabrication technology. Finite element analysis has been used to simulate the displacement distribution of the thin movable graphene film of the designed pressure sensor under the different pressures with different dimensions. From the simulation results, the optimized structure has been obtained which can be applied in the low measurement range from 10hPa to 60hPa. The length and thickness of the graphene film could be designed as 100μm and 0.2μm, respectively. The maximum mechanical stress on the edge of the sensitive membrane was 1.84kPa, which was far below the breaking strength of the silicon nitride and graphene film. |
| citation_standardnr | 6169128 |
| datenlieferant | ipn_articles |
| feed_id | 123476 |
| feed_publisher | Institute of Physics (IOP) |
| feed_publisher_url | http://www.iop.org/ |
| insertion_date | 2018-02-20 |
| journaleissn | 1757-899X |
| journalissn | 1757-8981 |
| publikationsjahr_anzeige | 2018 |
| publikationsjahr_facette | 2018 |
| publikationsjahr_intervall | 7984:2015-2019 |
| publikationsjahr_sort | 2018 |
| publisher | Institute of Physics (IOP) |
| quelle | IOP Conference Series: Materials Science and Engineering |
| relation | http://iopscience.iop.org/1757-899X/307/1/012004 |
| search_space | articles |
| shingle_author_1 | M Nie, Y H Xia and A Q Guo |
| shingle_author_2 | M Nie, Y H Xia and A Q Guo |
| shingle_author_3 | M Nie, Y H Xia and A Q Guo |
| shingle_author_4 | M Nie, Y H Xia and A Q Guo |
| shingle_catch_all_1 | Design and simulation analysis of a novel pressure sensor based on graphene film A novel pressure sensor structure based on graphene film as the sensitive membrane was proposed in this paper, which solved the problem to measure low and minor pressure with high sensitivity. Moreover, the fabrication process was designed which can be compatible with CMOS IC fabrication technology. Finite element analysis has been used to simulate the displacement distribution of the thin movable graphene film of the designed pressure sensor under the different pressures with different dimensions. From the simulation results, the optimized structure has been obtained which can be applied in the low measurement range from 10hPa to 60hPa. The length and thickness of the graphene film could be designed as 100μm and 0.2μm, respectively. The maximum mechanical stress on the edge of the sensitive membrane was 1.84kPa, which was far below the breaking strength of the silicon nitride and graphene film. M Nie, Y H Xia and A Q Guo Institute of Physics (IOP) 1757-8981 17578981 1757-899X 1757899X |
| shingle_catch_all_2 | Design and simulation analysis of a novel pressure sensor based on graphene film A novel pressure sensor structure based on graphene film as the sensitive membrane was proposed in this paper, which solved the problem to measure low and minor pressure with high sensitivity. Moreover, the fabrication process was designed which can be compatible with CMOS IC fabrication technology. Finite element analysis has been used to simulate the displacement distribution of the thin movable graphene film of the designed pressure sensor under the different pressures with different dimensions. From the simulation results, the optimized structure has been obtained which can be applied in the low measurement range from 10hPa to 60hPa. The length and thickness of the graphene film could be designed as 100μm and 0.2μm, respectively. The maximum mechanical stress on the edge of the sensitive membrane was 1.84kPa, which was far below the breaking strength of the silicon nitride and graphene film. M Nie, Y H Xia and A Q Guo Institute of Physics (IOP) 1757-8981 17578981 1757-899X 1757899X |
| shingle_catch_all_3 | Design and simulation analysis of a novel pressure sensor based on graphene film A novel pressure sensor structure based on graphene film as the sensitive membrane was proposed in this paper, which solved the problem to measure low and minor pressure with high sensitivity. Moreover, the fabrication process was designed which can be compatible with CMOS IC fabrication technology. Finite element analysis has been used to simulate the displacement distribution of the thin movable graphene film of the designed pressure sensor under the different pressures with different dimensions. From the simulation results, the optimized structure has been obtained which can be applied in the low measurement range from 10hPa to 60hPa. The length and thickness of the graphene film could be designed as 100μm and 0.2μm, respectively. The maximum mechanical stress on the edge of the sensitive membrane was 1.84kPa, which was far below the breaking strength of the silicon nitride and graphene film. M Nie, Y H Xia and A Q Guo Institute of Physics (IOP) 1757-8981 17578981 1757-899X 1757899X |
| shingle_catch_all_4 | Design and simulation analysis of a novel pressure sensor based on graphene film A novel pressure sensor structure based on graphene film as the sensitive membrane was proposed in this paper, which solved the problem to measure low and minor pressure with high sensitivity. Moreover, the fabrication process was designed which can be compatible with CMOS IC fabrication technology. Finite element analysis has been used to simulate the displacement distribution of the thin movable graphene film of the designed pressure sensor under the different pressures with different dimensions. From the simulation results, the optimized structure has been obtained which can be applied in the low measurement range from 10hPa to 60hPa. The length and thickness of the graphene film could be designed as 100μm and 0.2μm, respectively. The maximum mechanical stress on the edge of the sensitive membrane was 1.84kPa, which was far below the breaking strength of the silicon nitride and graphene film. M Nie, Y H Xia and A Q Guo Institute of Physics (IOP) 1757-8981 17578981 1757-899X 1757899X |
| shingle_title_1 | Design and simulation analysis of a novel pressure sensor based on graphene film |
| shingle_title_2 | Design and simulation analysis of a novel pressure sensor based on graphene film |
| shingle_title_3 | Design and simulation analysis of a novel pressure sensor based on graphene film |
| shingle_title_4 | Design and simulation analysis of a novel pressure sensor based on graphene film |
| timestamp | 2025-06-30T23:32:51.691Z |
| titel | Design and simulation analysis of a novel pressure sensor based on graphene film |
| titel_suche | Design and simulation analysis of a novel pressure sensor based on graphene film |
| topic | ZL |
| uid | ipn_articles_6169128 |