Chen, B. T.
Stamford, Conn. [u.a.] : Wiley-Blackwell
Published 1983
Staff View
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ISSN:
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0032-3888
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Keywords:
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Chemistry ; Chemical Engineering
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Source:
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Wiley InterScience Backfile Collection 1832-2000
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Topics:
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Chemistry and Pharmacology
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Physics
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Notes:
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A simple empirical relationship exists between the thickness and the solvent-evaporation rate of spin-coated thin films. The thickness of a film formed from an organic solvent solution can be approximated by the relationship\documentclass{article}\pagestyle{empty}\begin{document}$ D = K_0 \mu ^{0.36} \omega ^{ - 0.50} (E\lambda /C_p)^{0.60} $\end{document}, where μ is the viscosity of the coating solution, ω is the rotation speed, E is the solvent-evaporation rate, λ is the latent heat of evaporation, Cp is the heat capacity of the solvent, and K0 is a constant for volatile organic solvents. A similar relationship for aqueous polymer solutions is\documentclass{article}\pagestyle{empty}\begin{document}$ D = K_0 \mu ^{0.36} \omega ^{ - 0.50} (1.0 - RH)^{0.60} $\end{document}, where RH is the relative humidity of air around the spin coater and Ka is a constant for aqueous solutions. These relationships are helpful in understanding the mechanism of thin-film formation in spin coating.
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Additional Material:
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6 Ill.
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Type of Medium:
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Electronic Resource
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URL:
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