Fabrication and characterization of reactive ion beam etched SiC gratings : Proceedings of the 4th international conference on synchrotron radiation instrumentation - Ishiguro, E.; Yamashita, K.; Ohashi, H.; Sakurai, M.; Aita, O.; Watanabe, M.; Sano, K.; Koeda, M.; Nagano, T. (American Institute of Physics (AIP), 1992)
http://dx.doi.org/10.1063/1.1143037
Keywords: U; ZN