The 100-kV gas and metal ion source for high current ion implantation : Proceedings of the fourth International Conference on Ion Sources - Bugaev, S. P.; Nikolaev, A. G.; Oks, E. M.; Schanin, P. M.; Yushkov, G. Yu. (American Institute of Physics (AIP), 1992)
http://dx.doi.org/10.1063/1.1143827
Keywords: U; ZN