ALLIGATOR−An apparatus for ion beam assisted deposition with a broad-beam ion source : Proceedings of the fourth International Conference on Ion Sources - Wituschek, H.; Barth, M.; Ensinger, W.; Frech, G.; Rück, D. M.; Leible, K. D.; Wolf, G. K. (American Institute of Physics (AIP), 1992)
http://dx.doi.org/10.1063/1.1142946
Keywords: U; ZN