APA (7th ed.) Citation

Zeng, X. C., Liu, A. G., Kwok, T. K., Chu, P. K., & Tang, B. Y. (1997). Pulsed sheath dynamics in a small cylindrical bore with an auxiliary electrode for plasma immersion ion implantation. American Institute of Physics (AIP).

Chicago Style (17th ed.) Citation

Zeng, X. C., A. G. Liu, T. K. Kwok, P. K. Chu, and B. Y. Tang. Pulsed Sheath Dynamics in a Small Cylindrical Bore with an Auxiliary Electrode for Plasma Immersion Ion Implantation. [S.l.]: American Institute of Physics (AIP), 1997.

MLA (9th ed.) Citation

Zeng, X. C., et al. Pulsed Sheath Dynamics in a Small Cylindrical Bore with an Auxiliary Electrode for Plasma Immersion Ion Implantation. American Institute of Physics (AIP), 1997.