APA (7th ed.) Citation

Meng, W. J., Sell, J. A., Perry, T. A., Rehn, L. E., & Baldo, P. M. (1994). Growth of aluminum nitride thin films on Si(111) and Si(001): Structural characteristics and development of intrinsic stresses. American Institute of Physics (AIP).

Chicago Style (17th ed.) Citation

Meng, W. J., J. A. Sell, T. A. Perry, L. E. Rehn, and P. M. Baldo. Growth of Aluminum Nitride Thin Films on Si(111) and Si(001): Structural Characteristics and Development of Intrinsic Stresses. [S.l.]: American Institute of Physics (AIP), 1994.

MLA (9th ed.) Citation

Meng, W. J., et al. Growth of Aluminum Nitride Thin Films on Si(111) and Si(001): Structural Characteristics and Development of Intrinsic Stresses. American Institute of Physics (AIP), 1994.