Solid-phase epitaxial regrowth and dopant activation of P-implanted metastable pseudomorphic Ge0.12Si0.88 on Si(100) - Lie, D. Y. C.; Theodore, N. D.; Song, J. H.; Nicolet, M.-A. (American Institute of Physics (AIP), 1995)
http://dx.doi.org/10.1063/1.359261
Keywords: U