Quantitative imaging of local defects in very thin silicon dioxide films at low bias voltage by true oxide electron-beam-induced current - Lau, W. S.; Chan, D. S. H.; Phang, J. C. H.; Chow, K. W.; Pey, K. S.; Lim, Y. P.; Sane, V.; Cronquist, B. (American Institute of Physics (AIP), 1995)
http://dx.doi.org/10.1063/1.358994
Keywords: U