APA (7th ed.) Citation

Meng, W. J., & Doll, G. L. (1996). Ion energy effects in AlN thin films grown on Si(111). American Institute of Physics (AIP).

Chicago Style (17th ed.) Citation

Meng, W. J., and G. L. Doll. Ion Energy Effects in AlN Thin Films Grown on Si(111). [S.l.]: American Institute of Physics (AIP), 1996.

MLA (9th ed.) Citation

Meng, W. J., and G. L. Doll. Ion Energy Effects in AlN Thin Films Grown on Si(111). American Institute of Physics (AIP), 1996.