APA (7th ed.) Citation

Lu, H. C., Gusev, E. P., Gustafsson, T., & Garfunkel, E. (1997). Effect of near-interfacial nitrogen on the oxidation behavior of ultrathin silicon oxynitrides. American Institute of Physics (AIP).

Chicago Style (17th ed.) Citation

Lu, H. C., E. P. Gusev, T. Gustafsson, and E. Garfunkel. Effect of Near-interfacial Nitrogen on the Oxidation Behavior of Ultrathin Silicon Oxynitrides. [S.l.]: American Institute of Physics (AIP), 1997.

MLA (9th ed.) Citation

Lu, H. C., et al. Effect of Near-interfacial Nitrogen on the Oxidation Behavior of Ultrathin Silicon Oxynitrides. American Institute of Physics (AIP), 1997.