Structural characterization of rapid thermal oxidized Si1−x−yGexCy alloy films grown by rapid thermal chemical vapor deposition - Choi, W. K.; Chen, J. H.; Bera, L. K.; Feng, W.; Pey, K. L. (American Institute of Physics (AIP), 2000)
http://dx.doi.org/10.1063/1.371843
Keywords: U