Shah, D. M., Chan, W. K., Bhat, R., Cox, H. M., Schlotter, N. E., & Chang, C. C. (1990). InGaAs shallow junction fabrication using Langmuir–Blodgett film diffusion source. American Institute of Physics (AIP).
Chicago Style (17th ed.) CitationShah, D. M., W. K. Chan, R. Bhat, H. M. Cox, N. E. Schlotter, and C. C. Chang. InGaAs Shallow Junction Fabrication Using Langmuir–Blodgett Film Diffusion Source. Woodbury, NY: American Institute of Physics (AIP), 1990.
MLA (9th ed.) CitationShah, D. M., et al. InGaAs Shallow Junction Fabrication Using Langmuir–Blodgett Film Diffusion Source. American Institute of Physics (AIP), 1990.
Warning: These citations may not always be 100% accurate.