Hydrogen incorporation in the early stages of hydrogenated amorphous silicon deposition evaluated by real time infrared reflectance spectroscopy - Katiyar, M.; Feng, G. F.; Yang, Y. H.; Abelson, J. R.; Maley, N. (American Institute of Physics (AIP), 1993)
http://dx.doi.org/10.1063/1.110024
Keywords: U