Study on growth processes of particulates in helium-diluted silane rf plasmas using scanning electron microscopy - Shiratani, M.; Kawasaki, H.; Fukuzawa, T.; Tsuruoka, H.; Yoshioka, T.; Watanabe, Y. (American Institute of Physics (AIP), 1994)
http://dx.doi.org/10.1063/1.112833
Keywords: U