APA (7th ed.) Citation

Shiratani, M., Kawasaki, H., Fukuzawa, T., Tsuruoka, H., Yoshioka, T., & Watanabe, Y. (1994). Study on growth processes of particulates in helium-diluted silane rf plasmas using scanning electron microscopy. American Institute of Physics (AIP).

Chicago Style (17th ed.) Citation

Shiratani, M., H. Kawasaki, T. Fukuzawa, H. Tsuruoka, T. Yoshioka, and Y. Watanabe. Study on Growth Processes of Particulates in Helium-diluted Silane Rf Plasmas Using Scanning Electron Microscopy. Woodbury, NY: American Institute of Physics (AIP), 1994.

MLA (9th ed.) Citation

Shiratani, M., et al. Study on Growth Processes of Particulates in Helium-diluted Silane Rf Plasmas Using Scanning Electron Microscopy. American Institute of Physics (AIP), 1994.