Study on preparation of GaN and CoSi"2 epitaxial films by mass analyzed low energy dual ion beam epitaxy

ISSN:
0042-207X
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Physics
Type of Medium:
Electronic Resource
URL: