The effect of scaling on contact and interconnect properties with sputtered TiSi"2 metallization
| ISSN: |
0042-207X
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|---|---|
| Source: |
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
|
| Topics: |
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Physics
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| Type of Medium: |
Electronic Resource
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| URL: |