Instrumentation considerations in multichannel ellipsometry for real-time spectroscopy

An, I. ; Cong, Y. ; Nguyen, N.V. ; Pudliner, B.S. ; Collins, R.W.

Amsterdam : Elsevier

ISSN:	0040-6090
Source:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:	Physics
Type of Medium:	Electronic Resource
URL:	http://linkinghub.elsevier.com/retrieve/pii/0040-6090(91)90439-5