Two-step anneals to avoid bridging during Co silicidation
Schreutelkamp, R.J. ; Vandenabeele, P. ; Deweerdt, B. ; Verbeeck, R. ; Maex, K.
Amsterdam : Elsevier
Amsterdam : Elsevier
| ISSN: |
0169-4332
|
|---|---|
| Source: |
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
|
| Topics: |
Physics
|
| Type of Medium: |
Electronic Resource
|
| URL: |