APA (7th ed.) Citation

Fiebig, M., Kauf, M., Fair, J., Endert, H., Rahe, M., & Basting, D. (1999). New aspects of micromachining and microlithography using 157-nm excimer laser radiation. Springer.

Chicago Style (17th ed.) Citation

Fiebig, M., M. Kauf, J. Fair, H. Endert, M. Rahe, and D. Basting. New Aspects of Micromachining and Microlithography Using 157-nm Excimer Laser Radiation. Springer, 1999.

MLA (9th ed.) Citation

Fiebig, M., et al. New Aspects of Micromachining and Microlithography Using 157-nm Excimer Laser Radiation. Springer, 1999.