The measurement of energy spectra of neutral particles in low energy ion scattering

1432-0630

79.20N ; 35.80 ; 41.80G

Springer Online Journal Archives 1860-2000

Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics

Physics

Abstract An apparatus is described for low energy (0.1–10 keV) ion scattering (LEIS) experiments. A time of flight (TOF) spectrometer is incorporated in the system to be able to measure the energy of particles in the neutral state after scattering. The energy resolution ΔE/E of the TOF spectrometer is discussed and found to be 0.5% (FWHM). This is sufficient for our scattering experiments. An electrostatic analyzer (ESA) is used to measure the energy of scattered ions [ΔE/E=0.5% (FWHM)]. Experiments show that in general the ion dose needed to obtain a TOF spectrum (2×1010 ions/cm2) is much smaller than the dose needed for an ESA-spectrum (6×1013 ions/cm2). The ion spectra measured with the TOF spectrometer, by subtracting the neutral yield from the total yield, as well as with the ESA are found to agree quite well. This provides a way to calibrate the TOF spectrometer. The determination of the ion fraction of scattered particles is discussed [10 keV40Ar+ on Cu(100), scattering angle 30°]. It is shown that the TOF spectrometer is able to measure light recoil particles (e.g. hydrogen) from a heavy substrate. In the analysing system is, in addition to the TOF spectrometer, also incorporated a stripping cell to measure the energy of neutral scattered particles. An energy spectrum of neutral scattered particles measured with both methods is shown.

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